M2-Beam-Si: M2-Beam-IR-3mm: M2-Beam-IR-5mm: M2-Beam-UV: |
7-blades profiler head, Si type 10mmX10mm detector 7-blades profiler head, InGaAs-3mm diameter detector 7-blades profiler head, InGaAs-5mm diameter detector 7-blades profiler head, UV-Enhanced 10mmX10mm detector |